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A High Efficiency Ultra High Vacuum Compatible Flat Field Spectrometer for EUV Wavelengths

机译:适用于EUV波长的高效超高真空兼容平场光谱仪

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摘要

A custom, flat field, extreme ultraviolet EUV spectrometer built specifically for use with low power light sources that operate under ultrahigh vacuum conditions is reported. The spectral range of the spectrometer extends from 4 nm to 40 nm. The instrument optimizes the light gathering power and signal to noise ratio while achieving good resolution. A detailed description of the spectrometer and design considerations are presented, as well as a novel procedure that could be used to obtain a synthetic wavelength calibration with the aid of only a single known spectral feature. This synthetic wavelength calibration is compared to a standard wavelength calibration obtained from previously reported spectral lines of Xe, Ar and Ne ions recorded with this spectrometer.
机译:据报道,定制的平场极紫外EUV光谱仪专为在超高真空条件下运行的低功率光源使用而设计。光谱仪的光谱范围从4 nm扩展到40 nm。该仪器优化了集光功率和信噪比,同时实现了良好的分辨率。给出了光谱仪的详细说明和设计注意事项,以及一种新颖的过程,该过程可用于仅借助一个已知的光谱特征来获得合成波长校准。将该合成波长校准与从以前报告的用该光谱仪记录的Xe,Ar和Ne离子光谱线获得的标准波长校准进行比较。

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